S2100 Plasma system

Did you know that PVA TePla may be able to perform maintenance, repair, or provide spare parts to this system? Please contact our customer service department for further information.
800-527-5667 M-F 8am – 5pm Pacific Time.

Model S2100

• Automatic, three cycle, plasma barrel etcher with temperature programmer and three process gas inputs.

Reactor Center (PM 11220)

• Quartz chamber (12 in. diameter X20 in. deep) with hinged access door.
• 6 in. wafer compatible
• Optimum load: 50 wafers
• Temperature probe
• Cover safety interlocks
• Dimensions: 29 in. W X 31 in. D X 21 in. H

RF Generator (112)

• 0-1000 watts @ 13.56 MHz, continuously variable
• Air cooled tube type amplifier
• 200-240VAC/50/60Hz/1Ph/40 FLA

Installation Requirements

• Dry control air, 60 – 80 psig
• Process gases, 15 psig nominal
• Electrical power: 200 – 250 VAC, 1%,40 Amps, 50/60 Hz

Controller (2000 C)

• Three program operation
• Three gas flow rotameters, 0-900 sccm (air)
• Switch-selectable step termination options
• Automatic/manual operation
• Analog wattmeter, forward/reflected scales
• Analog pressure display, 0-20 torr
• Digital temperature display (oC)
• Temperature programmer with thumbwheel setpoint
• Digital elapsed timer, 0-99.9 min.
• ON/OFF vacuum, purge, gas and RF switches with indicator lights
• START, CYCLE, and RESET pushbuttons
• Cover safety interlocks
• Color – coded wiring
• Dimensions: 25 in. W X 24 in. D X 10 in. H