The SC28 Czochralski system was specially designed for the industrial production of silicon monocrystals from 200 – 300 mm (8 – 12″). It is flexibly configurable and thus enables, for example, a customer-specific swing-out of the vessel parts or the connection of various pump and filter solutions to the vacuum system.
Max. Ingot diameter: | 8″ – 12″ |
Ingot length: | Up to 3,600 mm |
Charge capacity: | Up to 450 kg |
Hotzone: | 28″ / 32″ |