Auto Ingot serves as an acoustic tomograph for volume inspection of single crystal ingots (e.g. Si, Ge, GaAs) to ensure process stability and quality.
3D detection
Auto Ingot is capable of analyzing voids and inclusions, estimating their depth and size simultaneously. It enables inspection of 5-12 inch Si ingots up to 400 mm thickness and a weight of 75 kg. The defect resolution may reach down to 100 μm voids in Silicon.
Customization
Investigations of large and heavy parts are customized according to geometry (load port and scanner).
Quality features
Auto Ingot is the best suited tool in the market for ultrasonic ingot inspection, because of its patent protected concept and the following features:
Loading port for 5-12 inch Si ingots.
High precision gripping device for ingots up to 75 kg.
Special adjustment feature for ingot alignment as compensation of wedge effects if the ingot front surface is not perpendicular to the ingot centre line.
Pre aligner and notch finder (or flat).
Fast multiple transducer scanning system (4 heads)
Drying station during and after inspection
Analysis software and hardware for defect depth detection
2 workstations for fast and save data acquisition and analysis
Defect review software: the system will estimate the 3-dimensional location of a defect inside the crystal volume (x;y;z) including compensation of wedge effects
