2000 Plasma system

PM 11020 REACTOR CENTER

POWER RATING ………………….1000 watts continuous input
REACTOR ……………………..1ea 10″ dia. x 20″ long
OPERATING PRESSURE RANGE ……….0.1 – 10 torr
VACUUM SEALS ………………….Silicone O rings and bell jar gasket
REACTOR WINDOW ………………..Hinged and spring loaded, with latch for open position
PRESSURE TRANSDUCER ……………Thermocouple type
IMPEDANCE CONTROL ……………..Matches from 10-1000 watts to present input impedance of 50 ohms at RF power input connector. Automatic impedance matching once preset.

Controls

FLOW ……………………….. 3 – ON/OFF
FLOWMETERS…………………… 3 – Range 0-900cc/min.
RF POWER CONTROL……………….3 – ON/OFF
WATTMETER……………………..0-1000W Forward, 0-300W Ref.
VACUUM METER……………………0-20 Torr range

906U Operating Controls

PURGE GAS …………………… Switch
VACUUM ……………………… Switch
MODE SWITCH …………………. Automatic or Manual control, switch selective
CYCLE……………………….. Push button to advance system logic to next state
START……………………….. Push button to activate automatic sequence
RESET ………………………. Push button to purge chamber, reset auto sequence at end of cycle
TIMER ………………………. 0-99.9 min digital timer

Mod. PM 119 RF Generator
500W @ 13.56MHz, 120VAC/1Ph/50/60Hz/15FLA