Did you know that PVA TePla may be able to perform maintenance, repair, or provide spare parts to this system? Please contact our customer service department for further information.
800-527-5667 M-F 8am – 5pm Pacific Time.
Branson/IPC Series 4000, plasma asher/cleaner system, with:
PM 11020 reactor center, with w/10″ dia x 20″ (D) quartz chamber, Mod. PM 702 1000W automatch network, (Series 4000 gas panel has 2 gas inputs w/rotometer metering controls), built in wattmeter and vacuum guage, Dim: 37″W x 33″ D x 21″ H, 150 lbs;
Mod. PM 906U-4 single channel digital controller, auto/manual logic, 0-99.9 min elapsed time display, 13.5″W x 16.5″D x 5″H, 20 lbs;
Branson/IPC Mod. PM 112 RF Generator
1000W @ 13.56MHz, 220VAC/1Ph/60Hz/40FLA
