Did you know that PVA TePla may be able to perform maintenance, repair, or provide spare parts to this system? Please contact our customer service department for further information.
800-527-5667 M-F 8am – 5pm Pacific Time.
Branson/IPC Series 4150 plasma asher/cleaner system
PM 4150-11630 reactor center, with 16″ (dia) x 30″ (D) aluminum chamber, Mod. PM 703 1500W automatch network, Series 4000 gas panel, 2 gas inputs, built in wattmeter and vacuum guage, auto/manual logic;
Mod. PM 906U-4 single channel digital controller, w/0-99.9 minute elapsed time display, auto/manual logic; Mod PM 112 RF Generator, 1000W @ 13.56 MHz, 208-240VAC/1Ph/50 or 60Hz/40 FLA
W/faraday cage insert.
