Did you know that PVA TePla may be able to perform maintenance, repair, or provide spare parts to this system? Please contact our customer service department for further information.
800-527-5667 M-F 8am – 5pm Pacific Time.
| Manufacturer | Branson/IPC |
| Model | 7102 |
| Etcher Type | Box |
| Rated Power Output | 1000 Watts |
| Number of Gas Inputs | Two Gas |
| RF Generator Model | ENI Power Systems–Model OEM-12AB-3 |
| Panel Meters | Digital |
| Accessories | MKS pressure transducer–Type 122A Seven shelf insert (option) Chamber workholder–#91381–Part No. 15699-03–Manufactured 1990 Controller workholder–#91381–Part No. 15676-01–Manufactured 1990 |
| Other Information | RF Generator: 250 V, 20 A, 1 phase Exterior dimensions: 17″W x 16.5″D x 8.25″H Front panel digital display has CRT display Vacuum connection: KF 40 Etch tunnel dimensions: 11.5″W x 26″D x 11.5″H 3″ diameter view port in door |
| Exterior Dimensions | |
| Width | 25.000 in (63.5 cm) |
| Depth | 44.000 in (111.8 cm) |
| Height | 44.000 in (111.8 cm) |
| Weight | 800 lb (363 kg) |
