Did you know that PVA TePla may be able to perform maintenance, repair, or provide parts to this system? Please contact our customer service department for further information.
800-527-5667 M-F 8am – 5pm Pacific Time.
Features and Specifications
Branson L2101
- Branson/IPC Mod. PM 11220 LP Reactor Center,
- 12″ (dia) x 20″ (D) quartz chamber, low particulate capability, 1ea Mod. PM 732 1000W automatch network, temperature probe, Dimensions: 28″Wx31″Dx20″H;
- Branson/IPC Mod. 9110 controller, multistep/multirecipe capability, up to 350 steps, CRT system status display, including gas and vacuum valves, massflow controller outputs, forward/reflected power, chamber pressure/temperature, current recipe and step status, and step terminator options (pressure, time, temperature, or endpoint signal),
- Branson/IPC Mod. 9160 Gas Handling Module, w/5ea mass flow controllers calibrated for: 2 SLPM N2, 2 SLPM O2, 200 SCCM O2, 1 SLPM CF4, 200 SCCM CF4, Auto Solenoid Valves;
- Branson/IPC Mod. 332 RF Generator, solid state, 1000W @ 13.56 MHz, 190-250VAC/1Ph/50/60Hz/40FLA, mounted in Power Cabinet Assy, w/Power Distribution Module
