P2100 Plasma system

Did you know that PVA TePla may be able to perform maintenance, repair, or provide parts to this system? Please contact our customer service department for further information.
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Features and Specifications

Branson P2100
Make:
Type:
Model: P2100

Description:

• Plasma Etcher/Stripper.
• Automatic and manual modes.
• Three process timers and three gas inputs.
• PM132 1000W 13.56 MHz RF generator.
• 150mm wafer compatible.
• Quartz Process Chamber: 12 in. dia. x 20 in. D. Includes vacuum pump