Did you know that PVA TePla may be able to perform maintenance, repair, or provide parts to this system? Please contact our customer service department for further information.
800-527-5667 M-F 8am – 5pm Pacific Time.
Features and Specifications
Branson/IPC Mod. P3100 plasma asher/stripper system, consisting of:
- Branson/IPC Mod. P3075 Reactor Center, w/1ea 12″ (dia) x 20″ (D) quartz chamber, Mod. 732 1000W automatch network, EPD 2000 End of Process Detector;
- Branson/IPC Mod. 3000+ Controller, single channel, two gas inputs, 0-99.9 minute digital timer with display; (similar controller to 906U-4 controller, for 4000 system)
- Branson/IPC Mod. PM 132 RF Generator, 1000W @ 13.56 MHz, continuously variable;
- Branson/IPC Mod. Power Distribution Module;
- Installation requirements: Dry control air 60-80 psig, process gasses, 15 psig nominal, Electrical power 190-250VAC/1Ph/40A/50/ 60Hz.
