S3100 Plasma system

Did you know that PVA TePla may be able to perform maintenance, repair, or provide spare parts to this system? Please contact our customer service department for further information.
800-527-5667 M-F 8am – 5pm Pacific Time.

Features and Specifications

Branson S3100 Barrel Asher consisting of:

• Model: S3100
• Branson PM112-1500 Watt Generator
• Branson 4000C Controller
• Automatic, one channel, plasma barrel etcher
• One process gas input.
• Quartz chamber (12″ diameter x 20″ deep)
• Hinged access door.
• Up to 6″/150mm wafer capable
• Optimum load: 50 wafers
• Cover safety interlocks
• Vacuum Pump included (rebuilt)
• Dimensions: 29″ x 31″ x 21″ (LxWxH)
• Weight: 75 lbs