The IoN Optimus 100 plasma system offers new and innovative features on a proven technology platform. The IoN Optimus 100 is an exceptionally well designed system emphasizing versatility and control. Its advanced features include configurable power coupling modes, ergonomic design with automatic door, data capturing software with Ethernet communication, state of the art process control and fail-safe system alarms. The ION Optimus 100 uses radio frequency (RF) generated plasma in a compact, fully integrated package.
The IoN 100 has replace this system. Please call customer service about this system.
Did you know that PVA TePla may be able to perform maintenance, repair, or provide parts to this system? Please contact our customer service department for further information.
800-527-5667 M-F 8am – 5pm Pacific Time.
Process Chamber
Material
Aluminum (A)
450 x 400 x 690 mm (W/H/D)
17.7 x 15.75 x 17.2 in
Material
Aluminum
380 x 580 x 101 mm (W/D/H tray to tray)
15 x 22.8 x 4 in
Mass Flow Control Up to 6 gasses
Process Pressure Approx. 120-2000 mTorr
Evacuation Time ~1 minute (pump dependen
RF Generator Air cooled
Frequency 13.56 MHz
Power Output 0-600 watts
0-1000 watts
Self contained footprint featuring all power and gas connections
Easy Roll around chassis with leveling feet
Standard 1000 x 970 x 1850 mm (W/D/H)
39.4 x 38.2 x 72.8”
490 kg / 1078 lbs. (with pump)
CE certified
EN 60204
EN 61326
