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    • PVA TePla America, LLC
    • 251 Corporate Terrace
      Corona, Ca 92879.

    GIGAfab Modular

    GigaFab Modular
    GigFabModular plasma system

    Single Wafer Asher with proprietary Microwave Plasma Source

    The Automatic Single Wafer Asher GIGAfab LED is designed to serve fabrication of opto-electronics, MEMS and power devices. It is equipped with a unique microwave plasma source for high uniformity, providing highly productive processing across a wide temperature range.

    The modular platform can be configured for 100, 150 or 200 mm wafer size with multiple cassette stations and up to three process chamber modules. Each process chamber features a gravity wafer chuck with lift pins for loading and unloading. It is thermoelectrically controlled from 65°C to 250°C. Wafers are loaded and unloaded by an atmospheric robot with dual arm configuration for highest throughput. A cooling plate allows cool down of the wafers prior to re-loading into the plastic cassettes. The chamber lid is easy to open for maintenance access (clam shell opening).

    System performance

    Wafer throughput: varying from 30-180 wafer/hour, depending on process and number of process chamber modules. Temperature range for stripping: 100-250°C Uniformity: +/- 7.5% across 200 mm for Descum

    Application

    • Resist strip and Descum for opto-electronics and MEMS
    • Sacrificial layer removal of, polyimide, PMMA etc.
    • Fast resist ashing after high-dose Implant and RIE

    Technical Specifications:

    Process Chamber

    Aluminum

    Process Gas Supply

    2 gas channels included, 2 optional

    Vacuum Gauge

    MKS Baratron capacitance manometer

    Wafer Loading

    • Fully automatic wafer handling
    • 3-axis robot with vacuum end
    • effector and wafer mapper,
    • optional double arm robot
    • Maximum Wafer Size 200 mm

    Plasma Generation

    Proprietary microwave source
    2.45 GHz, maximum power 1000 W

    End Point Detection

    Optical emission EPD, plasma
    verification

    System Control

    PC-based controller, with graphical
    user interface

    Operating System

    QNX real time platform

    Program Features

    • Manual or automaticoperation
    • multiple recipe storage (1-10 steps each),
    • user password, self test routines
    • Warning and error messaging
    • Real time process monitoring
    • On-screen display of graphic plots
    • Data logging, export of process data.

    Interfaces Ethernet

    USB, RS232 interface

    System State Signal

    Light tower R/Y/G/buzzer

    Standards

    CE-certified, Semi S2/S8 compliant

    Pressure Control

    Down-stream control valve

    Supplies

    • Electricity
    • 230/400 V, 50/60 Hz,
    • 3 phase, N, PE, 3 x 15 A
    • installed power approx. 12 kW

    Weight

    • One chamber
    • 450kg (990 lbs)
    • Two chambers
    • 650kg (1450 lbs
    • Three chambers
    • 850kg (1870 lbs)

    Process Gas, Vent

    1-2 bar (15–30 psi), 1/4” Swagelok

    Compressed Air

    6 mm Festo QS, 4-6 bar, (60-90 psi)

    Vacuum

    4 mm Festo QS, <20kPa, 50 l/min

    Dimensions (W/D/H)

    • One chamber
    • (straight) 750 x 1500 x 1850 mm
    • (30” x 59” x 73”)
    • One chamber
    • (angle) 1200 x 950 x 1850 mm
    • (48” x 38” x 73”)
    • Three chamber
    • 1750 x 1500 x 1850 mm
    • (69” x 59” x 73”)

    Options

    • Vacuum Pump (one per chamber)
    • SECS GEM factory automation interface