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    • PVA TePla America, LLC
    • 251 Corporate Terrace
      Corona, Ca 92879.

    IoN 300 Gas Plasma System

    The IoN 300 is our latest advancement in vacuum plasma technology. Gas plasma is fast becoming the technology of choice for surface modification of materials in the lifesciences, electronic and industrial arenas due to its versatility and low impact to our environment. For example, the trend towards miniaturization in medical diagnostics requires precision cleaning, and selective chemical functionalization.Plasma removes organic contamination several orders of magnitude more efficiently than wet chemical processing and can chemically functionalize surfaces at the nano-scale.As a result, plasma is replacing older types of treatments that are no longer practical or economical.
    The IoN 300 meets the ultra high volume production requirements of our customers, emphasizing versatility and control for their surface treatment needs. Its advanced features provide state of the art process control, fail-safe system alarms and data capturing software. This enables the equipment to meet the stringent control programs in the Life Science industries. The IoN 300 uses radio frequency (RF) generated plasma in a compact, fully integrated package.
    One very unique feature of the IoN 300 is the ability to quickly and easily alternate electrodes between multiple shelves (up to 30) or a secondary plasma configuration for multiple use treatments of components.

    Features include:

    • Configurable chamber that can accommodate various electrode configurations for high volume component treatment or unique hanging catheter processing
    • Plug and Play self installation
    • Onboard gas generator package option
    • Energy saving control feature for lowest cost of ownership
    • Industrial computer with a Windows® based system
    • Graphical User Interface (GUI) software complies with CFR Title 21 Part 11 and Semi E95-1101
    • User access control for separate process development, operator and maintenance programming and control
    • Configurable process tolerance controls allowing precise lot- to-lot repeatability
    • Remote statistical process control monitoring via Ethernet
    • Onboard diagnostic features and alarm logging
    • Recipe editor offers fast and versatile step control functionality
    • Liquid Crystal Display (LCD) touch panel and keyboard

    Technical Data

    Process Chamber

    Material Aluminum (standard)

    Chamber Volume

    300 liters (approximately) 18,236 cubic inches

    Chamber Dimensions

    419 x 441 x 1645 mm 16.5” x 17.38” x 64.75” L

    Process Gas

    Mass Flow Control
    up to 6 gasses

    Process Pressure

    120-2000 mTorr/ 0.16-2.66millibar

    Options

    • Stainless Steel Chamber
    • 1% pressure monitor
    • Recirculating liquid chiller
    • Pressure controller
    • Light tower
    • Barcode reader
    • Spectrographic endpoint detection
    • MFC upgrade for corrosive gasses
    • Printer
    • Monomer processing kit
    • H2 generator unit
    • Wall mount package
    • Vacuum pumps (rotary vane, dry, scroll and blower package)
    • Vapor phase MFC

    RF Generator

    Air cooled
    Frequency
    100KHZ, 13.56 MHz
    Power Output
    0-1000 watts (standard)
    0-1250 watts air cooled (optional)

    Power Requirements

    Electricity

    208-240 VAC, 3 phase 30A
    50/60 Hz 5-wire (standard)
    380-415 VAC, 3 phase 15A
    50/60 (optional)

    Process Gas

    Input pressure 1-2bar / 30 PSI

    Purge Gas

    Input pressure 1-2bar / 30 PSI

    Compressed Air

    Input pressure 5bar / 75 PSI

    Chassis

    Self contained footprint featuring all power and gasconnections
    Roll around chassis with leveling feet

    Dimensions

    1473 x 1064 x 1941mm
    58” x 41.9” x 76.4”

    Weight

    Control Cabinet
    228 kg / 503 lbs.
    Chamber Cabinet
    239 kg / 527 lbs.

    Evacuation Time

    ~1 minute (pump dependent)

    Safety Certification Standards

    • CE certified
    • EN 60204
    • EN 61326