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    • PVA TePla America, LLC
    • 251 Corporate Terrace
      Corona, Ca 92879.
    PVA TePla America, LLC/Products/RF Plasma Systems/Plasma Surface Treatment & CVD Deposition/IoN 7B PLASMA SYSTEM

    IoN 7B PLASMA SYSTEM

    IoN 7b Plasma System
    IoN 7B Plasma System

    IoN 7B Plasma System

    The IoN 7B plasma system is designed for R&D and low volume production applications. A compact, fully integrated low/radio frequency generated plasma is used in IoN 7B. The small table top design is specifically intended to meet the evolving demands of customer surface treatment needs at a low cost of ownership.

    PVA TePla is a proven and trusted resource globally for high-quality, reliable, cost-effective and easy to operate gas plasma systems. It offers some of the most advanced and innovative solutions for a wide variety of applications.

    Features Include:

    • Small foot print table top design
    • Plug and play self installation
    • 45 mm (1.77”) diameter view port
    • Flexible electrode
    • PC touch screen
    • Graphical User Interface (GUI)
    • Recipe editor for fast and versatile step controls

    Typical Applications:

    • Surface cleaning
    • Surface activation

    Process Chamber

    • Material: Aluminum
    • Dimension: 200 mm W x 220 mm D x 160 mm
    • (7.87” x 8.66” x 6.30”)
    • Volume: 7 L (0.25 ft3)
    • Electrodes: Ceiling, single shelf
    • Number of MFCs: 1
    • Base Pressure: 0.07 mbar (50 mTorr)
    • Pumping Time: 1 min (Pump dependent)
    • Loading: Manual

    Plasma Generator

    • Frequency/power: (20 to 100) kHz/200 W

    Options

    • Quartz Chamber: 150 mm Dia x 250 mm L
    • Water cooled electrode
    • Plasma generator:
    • (20 to 100) kHz/300 W
    • 13.56 MHz/300 W
    • Secondary plasma
    • Faraday/Etch cage
    • Additional MFCs
    • Corrosive gas MFCs
    • Process pressure control
    • Light tower with R/Y/G/Buzzer
    • Vacuum pumps (Rotary Vane, scroll)

    Machine Dimension and Weight

    • 650 mm W x 660 mm D x 550 mm H
    • (25.59”x25.98”x21.65”)
    • 59 kg (130.1 lb) (Varies with options)

    Facilities Requirements

    • Electricity: (110/220) VAC, 1f, 50/60 Hz, 3 wire, 2.3 kW
    • Process Gas Input Pressure: 1.4 bar (20 psi)
    • Purge Gas Input Pressure: 1.4 bar (20 psi)
    • Compressed Air Input Pressure: 1.4 bar (20 psi)

    Safety Certification Standards

    • CE Certified
    • EN 61010
    • EN 60204