Highest Resolution PVA TePla Analytical Systems acoustic microscopes have the worlds largest transducer frequency range for non-destructive ultrasonic testing. Transducers from 800 – 2000 MHz are available for high resolution, near-surface applications. Sam 1000 / 2000 is capable of resolutions down to 0,3 μm, perfect for small scale features in semiconductors (TSV) or life science (HeLa cells under incubation condition). Combined Optical and Ultrasonic Imaging The Sam 1000 / 2000 is mounted on a vibration-free workbench to mechanically stabilize the. A scanning acoustic microscope is combined with light microscope to allow in situ switching between the two working methods. The acoustic and optical microscope images are aligned in x-y direction to an accuracy of 5 μm, allowing the operator to compare the same position on the sample. Material Properties The Sam 1000 / 2000 allows for quantitatively measuring stress and elastic properties (E, G) of thin coating layers. This is possible because of PVA TePla Analytical Systems proprietary transducer, RF, and lens technology, which bring the acoustic beam to an excellent focus along a line. Additionally, surface wave velocities can be calculated by suitable Fourier analysis.
